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Jim Burdorf
at Synopsys Inc
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Publications (1)
Proceedings Article | 22 November 2023 Presentation
ML-model based curvilinear mask error correction
Linghui Wu, John Valadez, Jian Rao, Jim Burdorf, Yunqiang Zhang, Yongdong Wang, Alex Zepka, Folarin Latinwo
Proceedings Volume PC12751, PC1275109 (2023) https://doi.org/10.1117/12.2687654
KEYWORDS: Error control coding, Performance modeling, Resolution enhancement technologies, Printing, Optical proximity correction, Model-based design, Manufacturing, Extreme ultraviolet, Convection
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