Dr. Leandro Medina
at SandBox Semiconductor
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 10 April 2024 Poster + Paper
Proceedings Volume 12955, 129552M (2024) https://doi.org/10.1117/12.3010186
KEYWORDS: 3D metrology, Metrology, Artificial intelligence, 3D modeling, Etching, Calibration, 3D acquisition, Scatterometry, Manufacturing

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12499, 1249907 (2023) https://doi.org/10.1117/12.2662423
KEYWORDS: Semiconducting wafers, Metrology, Image segmentation, 3D modeling, Etching, Critical dimension metrology, Artificial intelligence, 3D metrology, Scanning electron microscopy, Image processing

Proceedings Article | 25 May 2022 Poster + Paper
Proceedings Volume 12056, 120560E (2022) https://doi.org/10.1117/12.2614301
KEYWORDS: Etching, Calibration, Data modeling, Surface roughness, Process modeling, Photomasks, Extreme ultraviolet, Artificial intelligence, Deposition processes, Optimization (mathematics)

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