Dr. Matthias F. Koch Profile

Dr. Matthias F. Koch

at Merck KGaA

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 9 April 2024 Poster + Paper

Assessing hybrid polymers as innovative photolithography material allowing advanced high aspect ratio/high resolution patterns for micro-optics and patterned passivation layers

M. Russew, A. Benker, J. Herrmann, T. Oberbiermann, S. Grützner, M. Koch, J. Wolf, A. Voigt, A. Schleunitz, G. Grützner

Proceedings Volume 12956, 129560R (2024) https://doi.org/10.1117/12.3010843

KEYWORDS: Polymers, Advanced patterning, Film thickness, Two photon polymerization, Passivation, Optical lithography, Micro optics, Liquids, Manufacturing, Lithography

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Proceedings Article | 1 May 2023 Poster + Paper

Novel polymer design for ultra-low stress material for advanced packaging applications

F. Meyer, M. Koch, K. Nishikawa, G. Larbig, K. Taniguchi

Proceedings Volume 12498, 124981R (2023) https://doi.org/10.1117/12.2658391

KEYWORDS: Polymers, Polymer thin films, Dielectrics, Semiconducting wafers, Shrinkage, Ultraviolet radiation, Coating stress, Thermal stability

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Proceedings Article | 1 May 2023 Presentation + Paper

Advancing high resolution photolithography with hybrid polymers for wafer-scale manufacture of micro-optics and patterned passivation layers

Matthias Koch, Maria Russew, L. Scharfenberg, Andreas Benker, Arne Schleunitz, Gabi Grützner

Proceedings Volume 12497, 124970M (2023) https://doi.org/10.1117/12.2658408

KEYWORDS: Polymers, Optical lithography, Ultraviolet radiation, Lithography, Passivation, Advanced patterning, Transparency

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