We present the MEXL, a novel type of vertically emitting semiconductor laser for biomedical applications. The core component of this laser system is the gain crystal based on a thin semiconductor membrane, which enables the fabrication of extremely compact laser modules. We discuss the current status of our MEXL developments and demonstrate multi-watt output powers in the visible spectral range.
Membrane-external-cavity surface-emitting lasers (MECSELs) consist of an epitaxial active region directly bonded to at least one transparent heatspreader with external cavity mirrors for feedback. This structure enables significant flexibility in the emission wavelength and yields a standalone laser gain medium amenable to enhanced power scaling via optimized thermal management. We outline a 4” wafer-scale manufacturing process for dual-SiC-heatspreader (SiC/epi/SiC) gain chips, incorporating external dielectric coatings and metallization for intimate mounting to a heatsink. Our process leverages low-temperature wafer bonding in concert with traditional deposition, lithography, and etching steps, allows hundreds of MECSEL gain chips to be simultaneously produced.
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