Dr. Ralf Koppert
at Siegert Thinfilm Technology GmbH
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 2 March 2020 Presentation + Paper
Proceedings Volume 11279, 1127908 (2020) https://doi.org/10.1117/12.2545119
KEYWORDS: Silicon, Infrared radiation, Microelectromechanical systems, Platinum, Gases, Packaging, Temperature metrology, Gas sensors, Resistance, Modulation, Black bodies, Photometry, Infrared detection, Infrared spectroscopy, Infrared technology

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