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Robert K. Messenger
at Brigham Young Univ
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Author
Publications (1)
Proceedings Article | 5 April 2006 Paper
Piezoresistive feedback for improving transient response of MEMS thermal actuators
Proceedings Volume 6174, 617408 (2006) https://doi.org/10.1117/12.657954
KEYWORDS: Sensors, Microelectromechanical systems, Resistance, Actuators, Feedback control, Control systems, Lead, Control systems design, Signal to noise ratio, Capacitance
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