Prof. Xiaoning Hu Profile

Prof. Xiaoning Hu

at Shanghai Institute of Technical Physics Cas

SPIE Involvement:

Author

Publications (24)

Proceedings Article | 9 October 2021 Poster + Presentation + Paper

Study on the picosecond pulsed laser micromachining for substrate-removed HgCdTe IRFPAs

Sh. Zhang, G. Y. He, Ch. Lin, Y. F. Wei, H. L. Chen, X. N. Hu, R. J. Ding

Proceedings Volume 11906, 119061M (2021) https://doi.org/10.1117/12.2599406

KEYWORDS: Mercury cadmium telluride, Micromachining, Laser damage threshold, Thermal effects, Laser applications

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Proceedings Article | 18 June 2018 Paper

A study on ALD ZnS passivation of HgCdTe IRFPAs detectors

A. L. Cui, Z. H. Ye, C. H. Sun, L. F. Liu, X. N. Hu, R. J. Ding, L. He

Proceedings Volume 10624, 106241Z (2018) https://doi.org/10.1117/12.2304578

KEYWORDS: Atomic layer deposition, Zinc, Mercury cadmium telluride, Sensors, Etching, Infrared detectors, Hydrogen, Scanning electron microscopy, Image processing, Infrared imaging

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Proceedings Article | 28 April 2017 Presentation + Paper

Large format high SNR SWIR HgCdTe/Si FPA with multiple-choice gain for hyperspectral detection

Xiaoning Hu, Aibo Huang, Qingjun Liao, Lu Chen, Xin Chen, Hua Fan, Honglei Chen, Ruijun Ding, Li He, Dexin Sun, Yinnian Liu

Proceedings Volume 10213, 102130E (2017) https://doi.org/10.1117/12.2262912

KEYWORDS: Signal to noise ratio, Staring arrays, Short wave infrared radiation, Mercury cadmium telluride, Silicon, Readout integrated circuits, Interference (communication), Diodes, Spectral resolution, Infrared detectors, Sensors, Hyperspectral imaging, Imaging systems, Quantum efficiency

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Proceedings Article | 1 November 2016 Paper

Optimization of plasma etching of SiO2 as hard mask for HgCdTe dry etching

Yiyu Chen, Zhenhua Ye, Changhong Sun, Shan Zhang, Wen Xin, Xiaoning Hu, Ruijun Ding, Li He

Proceedings Volume 10157, 101573L (2016) https://doi.org/10.1117/12.2247502

KEYWORDS: Etching, Silica, Mercury cadmium telluride, Plasma etching, Dry etching

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Proceedings Article | 20 May 2016 Paper

Inductively coupled plasma etching of HgCdTe IRFPAs detectors at cryogenic temperature

Y. Y. Chen, Z. H. Ye, C. H. Sun, S. Zhang, X. N. Hu, R. J. Ding, L. He

Proceedings Volume 9819, 981922 (2016) https://doi.org/10.1117/12.2222825

KEYWORDS: Etching, Mercury cadmium telluride, Cryogenics, Mercury, Plasma etching, Plasma, Reactive ion etching, Diffusion, Scanning electron microscopy, Argon

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Proceedings Article | 24 June 2014 Paper

Modeling of LWIR nBn HgCdTe photodetector

Z. Ye, Y. Chen, P. Zhang, C. Lin, X. Hu, R. Ding, L. He

Proceedings Volume 9070, 90701L (2014) https://doi.org/10.1117/12.2053288

KEYWORDS: Doping, Mercury cadmium telluride, Long wavelength infrared, Sensors, Cadmium, Photodetectors, Neodymium, Heterojunctions, Numerical analysis, Sensor performance

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Proceedings Article | 28 May 2014 Paper

Design of HgCdTe heterojunction photodiodes on Si substrate

P. Zhang, Z. Ye, Y. Chen, C. Lin, X. Hu, R. Ding, L. He

Proceedings Volume 9100, 91000R (2014) https://doi.org/10.1117/12.2050089

KEYWORDS: Photodiodes, Heterojunctions, Sensors, Mercury cadmium telluride, Interfaces, Silicon, Quantum efficiency, Resistance, Absorption, Optical filters

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Proceedings Article | 11 September 2013 Paper

Irradiance spatial non-uniformity correction in large-format infrared focal plane array measurement

Hua Hua, Yang Li, Xiao-ning Hu

Proceedings Volume 8907, 89071G (2013) https://doi.org/10.1117/12.2032468

KEYWORDS: Black bodies, Nonuniformity corrections, Infrared radiation, Staring arrays, Solids, Infrared imaging, Mercury cadmium telluride, Infrared detectors, Sensors, MATLAB

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Proceedings Article | 15 October 2012 Paper

N2 atmosphere annealing effect on HgCdTe electrical damage induced by ICP etching process

Jian Huang, Zhenhua Ye, Wenting Yin, Hanjie Hu, Chun Lin, Xiaoning Hu, Ruijun Ding, Li He

Proceedings Volume 8419, 84192I (2012) https://doi.org/10.1117/12.977400

KEYWORDS: Annealing, Etching, Mercury cadmium telluride, Mercury, Photodiodes, Sensors, Plasma etching, Array processing, Infrared imaging, Image sensors

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Proceedings Article | 15 October 2012 Paper

The study of selective heating of indium bump in MCT infrared focal plane array

Haiyan Zhang, Lan Cao, Fulong Zhuang, Xiaoning Hu, Haimei Gong

Proceedings Volume 8419, 84192L (2012) https://doi.org/10.1117/12.976828

KEYWORDS: Indium, Staring arrays, Infrared radiation, Silicon, Electromagnetism, Mercury cadmium telluride, Infrared imaging, Reliability, Packaging, Semiconductor materials

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Proceedings Article | 15 October 2012 Paper

Analysis of dark current in long-wavelength HgCdTe junction diodes at low temperature and an approximate method to calculate the trap density of depletion region

Hua Hua, Xiaohui Xie, Xiaoning Hu

Proceedings Volume 8419, 84191A (2012) https://doi.org/10.1117/12.975948

KEYWORDS: Diffusion, Mercury cadmium telluride, Temperature metrology, Diodes, Bismuth, Long wavelength infrared, Sensors, Head, Imaging devices, Transducers

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Proceedings Article | 15 October 2012 Paper

Surface treatment effects on the I-V characteristics of HgCdTe LW infrared photovoltaic detectors

Xiaohui Xie, Qingjun Liao, Jianmei Zhu, Gaoyin He, Jianxin Wang, Min He, Xiaoning Hu

Proceedings Volume 8419, 84191G (2012) https://doi.org/10.1117/12.977302

KEYWORDS: Mercury cadmium telluride, Diodes, Etching, Sensors, Photovoltaic detectors, Photovoltaics, Resistance, Infrared detectors, Infrared photography, Oxidation

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Proceedings Article | 31 May 2012 Paper

Studies on a novel mask technique with high selectivity and aspect-ratio patterns for HgCdTe trenches ICP etching

Z. Ye, W. Hu, Y. Li, J. Huang, W. Yin, C. Lin, X. Hu, R. Ding, X. Chen, W. Lu, L. He

Proceedings Volume 8353, 83532T (2012) https://doi.org/10.1117/12.918824

KEYWORDS: Mercury cadmium telluride, Etching, Silicon films, Silica, Plasma, Optical lithography, Scanning electron microscopy, Plasma etching, Standards development, Infrared radiation

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Proceedings Article | 31 May 2012 Paper

Laser power and temperature dependence on laser beam induced current signal in As-doped p-type HgCdTe

Yongguo Chen, Weida Hu, Xiaoshuang Chen, Zhenhua Ye, Jun Wang, Chun Lin, Xiaoning Hu, Wei Lu

Proceedings Volume 8353, 83532S (2012) https://doi.org/10.1117/12.918806

KEYWORDS: Mercury cadmium telluride, Temperature metrology, Thermography, Liquid phase epitaxy, Infrared radiation, Diffusion, Diodes, Physics, Laser irradiation, Infrared detectors

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Proceedings Article | 8 September 2011 Paper

Study of the characteristics of VLWIR HgCdTe photovoltaic detectors in variable-area diode test structures

Xiaohui Xie, Hua Hua, Guangyin Qiu, Qingjun Liao, Xiaoning Hu

Proceedings Volume 8193, 819335 (2011) https://doi.org/10.1117/12.900711

KEYWORDS: Diodes, Mercury cadmium telluride, Sensors, Diffusion, Resistance, Photovoltaics, Photovoltaic detectors, Quantum efficiency, Infrared sensors, Materials processing

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Proceedings Article | 9 February 2009 Paper

A study of Hg1-xCdxTe surfaces processed using inductively coupled plasma with CH4/H2/N2/Ar mixture

Wenhong Zhou, Zhenhua Ye, Xiaoning Hu, Ruijun Ding, Li He

Proceedings Volume 7158, 71581B (2009) https://doi.org/10.1117/12.807068

KEYWORDS: Plasma, Etching, Mercury cadmium telluride, Plasma etching, Dry etching, Atomic force microscopy, Scanning probe microscopy, Reactive ion etching, Chemical analysis, Argon

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Proceedings Article | 14 October 2005 Paper

Low energy inductively coupled plasma etching of HgCdTe

Xiaoning Hu, Zhenhua Ye, Ruijun Ding, Li He, Glenn Tan, Ligang Deng

Proceedings Volume 5964, 596408 (2005) https://doi.org/10.1117/12.625143

KEYWORDS: Etching, Mercury cadmium telluride, Plasma, Plasma etching, Argon, Anisotropic etching, Ions, Electrodes, Dry etching, Silica

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Proceedings Article | 10 January 2005 Paper

A preliminary study on MBE-grown HgCdTe two-color FPAs

Zhenhua Ye, Jun Wu, Xiaoning Hu, Yan Wu, Qingjun Liao, Haiyan Zhang, Jianxin Wang, Ruijun Ding, Li He

Proceedings Volume 5640, (2005) https://doi.org/10.1117/12.572167

KEYWORDS: Short wave infrared radiation, Photodiodes, Sensors, Mid-IR, Mercury cadmium telluride, Cadmium, Indium, Detector arrays, Doping, Heterojunctions

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Proceedings Article | 10 January 2005 Paper

Analysis of 1/f noise on LWIR HgCdTe photodiodes with different passivation

Jinsui Liang, Tao Sun, Yanjin Li, Xiaoning Hu

Proceedings Volume 5640, (2005) https://doi.org/10.1117/12.572132

KEYWORDS: Photodiodes, Zinc, Mercury cadmium telluride, Diodes, Long wavelength infrared, Diffusion, Resistance, Amplifiers, Ions, Boron

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Proceedings Article | 10 January 2005 Paper

The dark current mechanism of HgCdTe photovoltaic detector passivated by different structure

Tao Sun, Yan Jin Li, Xing Guo Chen, Xiao Ning Hu, Li He

Proceedings Volume 5640, (2005) https://doi.org/10.1117/12.571918

KEYWORDS: Mercury cadmium telluride, Diodes, Zinc, Photovoltaic detectors, Photodiodes, Diffusion, X-rays, Semiconducting wafers, Deposition processes, Amplifiers

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Proceedings Article | 29 November 2000 Paper

RFTIR measurement on backside-thinned detector film of InSb infrared focal plane arrays

Bo-Liang Chen, Hua Yang, Xiaoning Hu, Juncao Lin

Proceedings Volume 4086, (2000) https://doi.org/10.1117/12.408419

KEYWORDS: Staring arrays, Sensors, Infrared radiation, Reflectivity, Infrared sensors, Infrared detectors, Reflection, FT-IR spectroscopy, Nondestructive evaluation, Physics

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Proceedings Article | 18 November 1998 Paper

Influence of ion implantation on the reflectance spectrum of HgCdTe

Xiangyang Li, JianHua Zhao, Wenjuan Zhu, Runqing Jiang, Yueyuan Xia, Xiaoning Hu, Jun Zhao, Huiqin Lu, Xinwen Hu, Jiaxiong Fang

Proceedings Volume 3437, (1998) https://doi.org/10.1117/12.331317

KEYWORDS: Reflectivity, Ions, Mercury cadmium telluride, Ion implantation, Refractive index, Infrared radiation, Reflection, Infrared sensors, Microscopes, Oxidation

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Proceedings Article | 11 August 1998 Paper

Relationship between the cut-on wave number of the transmission spectra and the cut-off wave number of the response spectra

Wenjuan Zhu, Xiaoning Hu, Haimei Gong, Jiaxiong Fang

Proceedings Volume 3553, (1998) https://doi.org/10.1117/12.318059

KEYWORDS: Sensors, Temperature metrology, Infrared sensors, Infrared radiation, FT-IR spectroscopy, Measurement devices, Transducers, Physics, Infrared detectors, Bridges

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Proceedings Article | 7 October 1994 Paper

Properties of the oxidation on Hg1-xCdxTe by ellipsometry

Xierong Hu, Runqing Jiang, Fei-Fei Wu, Shuzhi Zhang, Xiangyang Li, Jiaxiong Fang, Guosen Xu, Jie Shen, Xiaoning Hu

Proceedings Volume 2274, (1994) https://doi.org/10.1117/12.189232

KEYWORDS: Oxides, Mercury cadmium telluride, Surface finishing, Polishing, Interfaces, Ellipsometry, Optical testing, Mercury, Cadmium, Oxidation

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Showing 5 of 24 publications

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