Mr. Yun Da Chua Profile

Yun Da Chua

at Nanyang Technological Univ

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Author

Publications (2)

Proceedings Article | 15 March 2023 Poster + Paper

An integrated MEMS thermal emitter with piezoelectric actuation

Nanxi Li, Andrew Whye Keong Fong, Huanhuan Wang, Leh Woon Lim, Landobasa Y. Tobing, Yun Da Chua, Linfang Xu, Weiguo Chen, Qingxin Zhang, Hong Cai, Qi Jie Wang, Lennon Yao Ting Lee

Proceedings Volume 12434, 124340T (2023) https://doi.org/10.1117/12.2649536

KEYWORDS: Microelectromechanical systems, Silicon, Fabrication, Aluminum nitride, Molybdenum, Emission spectrum, Silicon nitride, Emission wavelengths, Electrodes, Biological and chemical sensing

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Proceedings Article | 5 March 2021 Presentation + Paper

Photonic crystal MEMS emitter for chemical gas sensing

Nanxi Li, Qin Chao, Zhonghua Gu, Shiwei Song, Yanyan Zhou, Shaonan Zheng, Linfang Xu, Yun Da Chua, Qingxin Zhang, Hong Cai, Daohua Zhang, Qi Jie Wang, Lennon Lee

Proceedings Volume 11697, 116970M (2021) https://doi.org/10.1117/12.2581358

KEYWORDS: Photonic crystals, Industrial chemicals, Biological and chemical sensing, Microelectromechanical systems, Mid-IR, Thermal sensing, Silicon, Sensing systems, Optical sensors, Process control

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