CONFERENCE PROCEEDINGS
Advanced Search
Shuang Gong
at Shanghai Institute of Optics & Fine Mechanics CAS
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 5 November 2020 Paper
Effects of mid-spatial frequency surface error on pupil characteristic parameters in lithography illumination system
Shuang Gong, Baoxi Yang, Huijie Huang
Proceedings Volume 11568, 1156820 (2020) https://doi.org/10.1117/12.2580348
KEYWORDS: Lithographic illumination, Error analysis, Lithography, Surface finishing, Photomasks, Manufacturing, Aspheric lenses
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top