SPECIAL SECTION ON MOEMS Design, Technology, and Applications Micromirrors and Adaptive Optics

MOEMS 3-D scan mirror for single-point control of beam deflection and focus

[+] Author Affiliations
Yuhe Shao

Montana State University-Bozeman, Department of Electrical and Computer Engineering, Bozeman, Montana 59717

David L. Dickensheets

Montana State University-Bozeman, Department of Electrical and Computer Engineering, Bozeman, Montana 59717

J. Micro/Nanolith. MEMS MOEMS. 4(4), 041502 (October 14, 2005). doi:10.1117/1.2107127
History: Received October 01, 2004; Revised January 13, 2005; Accepted July 13, 2005; Published October 14, 2005
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A 1500μm-diam silicon∕silicon nitride 3-D scan mirror has been built using MOEMS technology. It is capable of static and dynamic beam scanning achieved with a biaxial gimbal. A gold-coated deformable membrane at the center of the device provides both focus control (z axis) and spherical aberration correction. This architecture is able to move the focus of a laser beam throughout a 3-D space with one single optical surface, and is referred to as a MOEMS 3-D scan mirror. This mirror will be incorporated into a miniature confocal laser scanning microscope for biomedical in-situ imaging applications. We describe the 3-D scan mirror design, fabrication, characterization, and briefly describe the target application. A confocal laser scanning microscope using this mirror to achieve beam scanning and focus control is also demonstrated.

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© 2005 Society of Photo-Optical Instrumentation Engineers

Citation

Yuhe Shao and David L. Dickensheets
"MOEMS 3-D scan mirror for single-point control of beam deflection and focus", J. Micro/Nanolith. MEMS MOEMS. 4(4), 041502 (October 14, 2005). ; http://dx.doi.org/10.1117/1.2107127


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