Articles

Combined effects of prepulsing and target geometry on efficient extreme ultraviolet production from laser produced plasma experiments and modeling

[+] Author Affiliations
Ahmed Hassanein, Tatyana Sizyuk, Valeryi Sizyuk, Sivanandan S. Harilal

Purdue University, Center for Materials Under Extreme Environment, School of Nuclear Engineering, West Lafayette, Indiana 47907-2017

J. Micro/Nanolith. MEMS MOEMS. 10(3), 033002 (July 20, 2011). doi:10.1117/1.3609043
History: Received March 11, 2011; Revised May 25, 2011; Accepted June 08, 2011; Published July 20, 2011; Online July 20, 2011
Text Size: A A A

Laser produced plasmas (LPPs) are currently a promising source of an efficient extreme ultraviolet (EUV) photon source production for advanced lithography. Optimum laser pulse parameters with adjusted wavelength, energy, and duration for a simple planar or spherical tin target can provide 2% to 3% conversion efficiency (CE) in laboratory experiments. Additional effects such as targets with complex geometry and tin-doped targets using prepulsing of laser beams can significantly increase CE. Recent studies showed that such improvements in an LPP system are due to reduction in laser energy losses by decreasing photons transmission (higher harmonic of Nd:yttrium-aluminum-garnet laser) or photons reflection (for CO2 laser). Optimization of target heating using prepulses or ablating low-density and nanoporous tin oxide can further improve LLP sources by creating more efficient plasma plumes and, as a result, increase CE, the most important parameter for EUV sources. We investigated the combined effects of prepulsing with various parameters and different target geometries on EUV conversion efficiency and on energetic ions production. The much higher reflectivity of CO2 laser from a tin target leads to two possible ways for system improvement using prepulses with shorter laser wavelengths or using more complex targets geometries with special grooves as developed previously by the authors.

Figures in this Article
© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation

Ahmed Hassanein ; Tatyana Sizyuk ; Valeryi Sizyuk and Sivanandan S. Harilal
"Combined effects of prepulsing and target geometry on efficient extreme ultraviolet production from laser produced plasma experiments and modeling", J. Micro/Nanolith. MEMS MOEMS. 10(3), 033002 (July 20, 2011). ; http://dx.doi.org/10.1117/1.3609043


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Capillary discharge-driven metal vapor plasma waveguides. Phys Rev E Stat Nonlin Soft Matter Phys 2005;72(2 Pt 2):026413.
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.