Dr. Marc A. Verschuuren
CTO at SCIL Nanoimprint Solutions
SPIE Involvement:
Author
Area of Expertise:
nanoimprint , nanophotonics , lithography
Publications (15)

Proceedings Article | 10 April 2024 Presentation
Marc Verschuuren, Bradley Williams, Mohammad Ramezani, Robert van de Laar, Jeroen Visser, Gert-Jan Hurxkens, Rob Voorkamp
Proceedings Volume PC12956, PC1295609 (2024) https://doi.org/10.1117/12.3003683
KEYWORDS: Semiconducting wafers, Nanoimprint lithography, Nanophotonics, Wafer-level optics, Scatterometry, Refractive index, Optical alignment, Metalenses, Etching, Reproducibility

Proceedings Article | 30 April 2023 Presentation
Marc Verschuuren, Rob Voorkamp, Mohammad Ramezani, Gert-Jan Hurxkens, Jeroen Visser
Proceedings Volume PC12497, PC1249709 (2023) https://doi.org/10.1117/12.2658052
KEYWORDS: Nanoimprint lithography, Semiconducting wafers, Refractive index, Wafer-level optics, Optical lithography, Objectives, Materials processing, Diffraction, 3D modeling, Waveguides

Proceedings Article | 16 March 2023 Presentation + Paper
Marc Verschuuren, Rob Voorkamp, Jeroen Visser, Mohammad Ramezani
Proceedings Volume 12449, 124490A (2023) https://doi.org/10.1117/12.2655366
KEYWORDS: Optical gratings, Semiconducting wafers, Refractive index, Nanoimprint lithography, Nanophotonics, Scatterometry, Sol gels, Optical lithography, Metalenses

Proceedings Article | 15 March 2023 Poster + Paper
Proceedings Volume 12433, 124330I (2023) https://doi.org/10.1117/12.2649342
KEYWORDS: Optical gratings, Scatterometry, Polarization gratings, Diffraction gratings, Nanoimprint lithography, Optical microscopes, Metrology, Data modeling

Proceedings Article | 7 March 2022 Presentation
Proceedings Volume 11932, 119320C (2022) https://doi.org/10.1117/12.2632477

Showing 5 of 15 publications
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